Research of diamond-like carbon film deposited by double pulsed lasers

Abstract

In the research of Diamond-like carbon (DLC) Film deposited by pulsed laser, method of double pulsed laser deposition was presented. Ti:Sapphire (800nm, 120fs) laser and KrF (248nm, 20ns) laser were used orderly to ablate graphite target. Through controlling parameters of two laser beams, double-layer DLC film was deposited on silicon substrate. The hardness and inner-stress of the DLC film changed gradually from substrate to atmosphere-interface. Nanoindentation measurement system and fourier transfer infrared spectrograph were used to hardness and transmittance of the film. Meanwhile, adhesive tape, 9.8N rubber, NaOH liquor and boiling water were used to compare the adhesion and environment adaptability of double layer or monolayer DLC film samples qualitatively. Results showed that DLC film deposited by double beam pulsed laser not only had high transmittance and hardness, but also kept well and had no phenomenon of peeling off after the tests including dipped in boiled water, etc. Compared to DLC films deposited by single pulsed laser, the chemical and thermal inertness of the double-layer DLC film deposited by double pulsed lasers was much better.